JPH0392031U - - Google Patents
Info
- Publication number
- JPH0392031U JPH0392031U JP15315289U JP15315289U JPH0392031U JP H0392031 U JPH0392031 U JP H0392031U JP 15315289 U JP15315289 U JP 15315289U JP 15315289 U JP15315289 U JP 15315289U JP H0392031 U JPH0392031 U JP H0392031U
- Authority
- JP
- Japan
- Prior art keywords
- shaft body
- vapor phase
- phase growth
- rotating shaft
- regular polygon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000006698 induction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15315289U JPH0392031U (en]) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15315289U JPH0392031U (en]) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392031U true JPH0392031U (en]) | 1991-09-19 |
Family
ID=31699376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15315289U Pending JPH0392031U (en]) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392031U (en]) |
-
1989
- 1989-12-28 JP JP15315289U patent/JPH0392031U/ja active Pending
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